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与传统传感器相比,全光纤马赫泽德尔干涉仪(MZI)传感器,具有结构简单、分辨率高、稳定性好等优点,在石油化工、健康监测、生物化学等领域有广泛应用。介绍了MZI全光纤传感器的传感机理,对比了其他的加工方法,如电弧放电、加热拉伸、CO2激光诱导微变形等的优缺点,详细介绍了飞秒激光加工得到的MZI传感器的结构形式、折射率和温度等传感性能。重点阐述了飞秒激光加工MZI的研究现状和优点,并对运用飞秒激光方法加工的MZI进行了总结和展望。
Compared with traditional sensors, all-fiber Mach-Zehnder interferometer (MZI) sensors have the advantages of simple structure, high resolution and good stability, and are widely used in petrochemical industry, health monitoring, biochemistry and other fields. The sensing mechanism of MZI all-optical fiber sensor is introduced. The advantages and disadvantages of other processing methods, such as arc discharge, heating and stretching, CO2 laser-induced micro-deformation and so on, are compared. The structure of MZI sensor fabricated by femtosecond laser processing is introduced in detail , Refractive index and temperature sensing performance. The research status and advantages of MZI in femtosecond laser machining are emphatically described. The MZI processing using femtosecond laser method is also summarized and prospected.