研制了一台高质量的激光远场CCD诊断仪（LFCD），准备用于实时监测φ250mm高功率激光系统的远场光学性能，以评价激光系统末端输出光束的可聚焦能力。用一台1．06μm连续输出的半导体泵浦固体激光器，扩束成φ360mm理想平行光源初检LFCD，获得此仪器的可聚焦能力优于1．2倍衍射极限，此弥散角内包含的能量占总光能的70％～80％。仪器的调焦精度≤±0．1mm，在聚焦镜焦深的范围之内。 A high-quality laser far-field CCD diagnostic instrument (LFCD) was developed for real-time monitoring of the far-field optical performance of a φ250 mm high-power laser system to evaluate the focusability of the output beam at the end of a laser system. With a 1.06μm continuous output of semiconductor pumped solid-state lasers, expansion beam into the ideal parallel light source φ360mm LFCD, get the instrument’s ability to focus better than 1.2 times the diffraction limit, the diffusion angle contains energy accounted for The total light energy of 70% to 80%. Focusing accuracy of the instrument ≤ ± 0.1mm, focus within the focal depth range of the mirror.