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介绍了用LIGA技术研制用于微行星齿轮减速器的微齿轮过程中 ,X光掩模板图形的CAD设计。它包括微齿轮的建模和图形的生成 ,微齿轮图形的分割及图形的拟合。
The CAD design of X-ray photomask pattern in the process of developing micro-gear used in micro-planetary gear reducer with LIGA technology is introduced. It includes micro-gear modeling and graphics generation, micro-gear graphics segmentation and graphics fitting.