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以现代激光工业制造为应用背景,探讨激光光束光斑质量诊断技术的发展。从光束束宽的定义出发,对比了两种束宽定义方法的不同,阐述了光束质量诊断与光束束宽定义之间的关系。依据国家和国际标准,研究了光束束宽、束散角测量和计算方法的发展,以基于空心探针原理的光束光斑质量诊断技术及设备为重点研究内容,介绍了基于实测目的的测量方法。分析结果表明,以包含功率(或能量)占总功率百分比定义的束宽为基础,基于空心探针原理的激光光束光斑质量诊断技术结合双曲线拟合方法计算,能够更好地反映激光束的传输和聚焦性能,诠释激光制造系统的制造能力。
With the modern laser industry as the application background, this paper discusses the development of laser beam spot quality diagnosis technology. Starting from the definition of beamwidth, the difference between the two methods of definition of beamwidth is contrasted, and the relationship between beam quality diagnosis and beamwidth definition is expounded. Based on national and international standards, the development of beamwidth and beam angle measurement and calculation methods are studied. The beam spot quality diagnosis technology and equipment based on the hollow probe principle are mainly studied, and the measurement methods based on the measurement purpose are introduced. The analysis results show that the laser beam spot quality diagnosis based on the hollow probe principle and the hyperbolic fitting method based on the beam width defined by the included power (or energy) as a percentage of the total power can better reflect the characteristics of the laser beam Transmission and focusing performance, interpretation of laser manufacturing system manufacturing capacity.