STUDY ON COMPOSITION, MICROSTRUCTURE AND HARDNESS OF DLC FILMS BY VCAD

来源 :金属学报(英文版) | 被引量 : 0次 | 上传用户：softdir

【摘要】

：

DLC super-hard films have been deposited on the substrates of single crystalline Si, pure Ti and stainless steel 18-8 by a method of vacuum cathode arc depositi

【作者】

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L.Chen Z.Y.Liu D.C.Zeng W.Q.Qiu Z.H.Yuan S.S.Lin H.J.Hou

【机构】

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Institute of Materials Science & Technology, College of Mechanical Engineering, South China Universi

【出处】

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金属学报(英文版)

【发表日期】

：

2003年4期

【关键词】

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DLC films vacuum cathode arc deposition micro-hardness

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论文部分内容阅读

DLC super-hard films have been deposited on the substrates of single crystalline Si, pure Ti and stainless steel 18-8 by a method of vacuum cathode arc deposition(VCAD). The composition, microstructure and micro-hardness of the films have been studied in this paper. The results indicate that hardness of the DLC films is different on the different substrates. Hardness of the films increases with decreasing in surface roughness of the films. The maximum value of micro-hardness belongs to the DLC films deposited under the hydrogen pressure of 0.35Pa and the negative bias of 100V.

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