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飞秒激光脉冲具有极高的峰值功率和极短的脉冲宽度,与物质相互作用时呈现出强烈的非线性效应,使其可以深入透明介质内部,以超越光学衍射极限的精度对材料进行三维微加工.除此之外,飞秒激光三维直写技术具有高度的灵活性,即可以在单一芯片上制备并集成多种不同功能的微纳结构.这些特性使该技术迅速发展成为微制造领域的研究热点,在微流体、微光学、光电子学以及光量子芯片制备与集成等领域表现出广阔的前景.但还有一些问题限制飞秒激光直写技术的进一步发展,比如加工通道的尺寸和长度限制、较高的加工表面粗糙度等.针对这些问题,本文重点介绍了在玻璃中制备三维微纳流体通道以及高品质光学微腔的最新进展.
The femtosecond laser pulse has extremely high peak power and extremely short pulse width. It exhibits a strong nonlinear effect when interacting with matter, enabling it to penetrate deep into the transparent medium. The three-dimensional In addition, femtosecond laser three-dimensional direct write technology is highly flexible, that is, a single chip can be prepared and integrated a variety of different functions of the micro-nano structure.These features make the rapid development of the technology into the field of micro-manufacturing Research hot spots have shown broad prospects in the fields of microfluidics, micro-optics, optoelectronics and photonic chip preparation and integration, etc. However, there are still some problems that limit further development of femtosecond laser direct writing technologies, such as the size and length limitation of processing channels , Higher surface roughness, etc. In response to these problems, this article focuses on the latest progress in the preparation of three-dimensional micro-nano fluid channels in glass and high-quality optical microcavities.