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微结构光栅是一种广泛应用的电子元件。采用随机微粒群优化(SPSO)算法反演了一维铝基衬底矩形光栅的几何结构参数。首先介绍了严格耦合波分析(RCWA)法和微粒群优化算法的基本原理,并采用RCWA法求解了光栅内电磁场问题;然后根据正问题求得的光栅光谱反射率建立目标函数,并采用SPSO算法优化目标函数,反演得到单槽和双槽矩形光栅的周期、凸脊宽度和凹槽深度;最后分析了种群大小和搜索区间对反演结果的影响。结果表明,SPSO算法可以准确地反演光栅几何结构参数,并推荐种群数取30。
Microstructure grating is a widely used electronic component. The geometric parameters of one-dimensional Al-based rectangular gratings are inversed using the stochastic particle swarm optimization (SPSO) algorithm. Firstly, the basic principles of RCWA and PSO are introduced. The RCWA method is used to solve the problem of electromagnetic field in the grating. Then the objective function is established based on the grating reflectance obtained from the positive problem and the SPSO algorithm The objective function is optimized to obtain the periodic, ridge width and groove depth of the single-and double-groove rectangular grating. Finally, the effects of population size and search interval on the inversion results are analyzed. The results show that the SPSO algorithm can accurately reflect the geometric parameters of the grating and the recommended population is 30.