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目前监测超纯水中离子含量的最通用仪器是电导率测定仪。然而,这些仪器提供的电导率测量结果将受几种因素的影响,这些仪器也不能提供有关特殊离子的任何信息。本文介绍一种新方法,应用离子层析可以监测高纯水中的离子。采用预先富集,达到要求的灵敏度。业已表明,送回离子层析实验室的瓶装现场采样是一种合格的实用方法。本文介绍了15个LSI和VLSI制造厂所用纯水的离子层析研究结果。
At present, the most common instrument for monitoring the ion content in ultrapure water is the conductivity meter. However, the conductivity measurements provided by these instruments will be affected by several factors, nor do they provide any information on specific ions. This article describes a new method that uses ion chromatography to monitor ions in high purity water. Pre-enrichment is used to achieve the required sensitivity. It has been shown that bottled on-site sampling sent back to an ion chromatography laboratory is a good and practical method. This article presents the results of ion chromatography studies of pure water used in 15 LSI and VLSI manufacturing plants.