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利用磁控溅射的方法,在热玻璃基片上制备了以Ag,Ti,Cu,Cr,Pt和Ta为底层的[Fe/Pt]n多层膜,后经不同温度真空热处理,得到L10有序结构的FePt薄膜(L10-FePt).实验结果表明,以Ag和Ti为底层,通过采用基片加温,同时利用[Fe/Pt]n多层膜结构,可以促进FePt薄膜的有序化过程,使FePt-L10有序化温度从500℃降低到350℃.在较高的温度下退火,以Ag为底层对薄膜的磁性能影响较小,而以Ti为底层在高于500℃退火后,矫顽力明显下降.在400℃退火20min后,以Ag和Ti为底层的样品平行膜面的矫顽力分别达到597kA/m和645kA/m,剩磁比分别达到0·81和0·94,为将来FePt-L10有序相合金薄膜用于未来超高密度磁记录介质打下基础.
The [Fe / Pt] n multilayered films with Ag, Ti, Cu, Cr, Pt and Ta as the underlying layers were prepared on the hot glass substrate by magnetron sputtering. After vacuum heat treatment at different temperatures, (L10-FePt). The experimental results show that using Ag and Ti as the underlayer, the ordering of the FePt thin films can be promoted by using the substrate heating and the [Fe / Pt] n multilayer structure Process to reduce the ordering temperature of FePt-L10 from 500 ℃ to 350 ℃ .At annealing at higher temperature, the effect of Ag on the magnetic properties of the film is less affected, while the Ti-based layer is annealed at above 500 ℃ , The coercive force obviously decreased.The coercive force of the sample parallel film surface with Ag and Ti as the bottom layer reached 597kA / m and 645kA / m respectively after annealed at 400 ℃ for 20min, the remanence ratios reached 0.81 and 0 · 94, laid the foundation for the future ultra-high density magnetic recording medium for the future FePt-L10 ordered phase alloy film.