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针对工业领域和计量界对定位精度要求的提高,提出了一种基于迈克尔逊干涉仪反向特性的定位控制方法。该方法采用相位锁定控制和外差干涉技术来完成位置测量和控制。在严格控制实验环境条件下,得到了步距值为5 nm的双向步进位移。步距值的不确定度为8×10-9 nm,位移重复性误差小于1 nm。该定位方法的测量尺寸可直接溯源至长度标准,并且采用光电步进相移法可克服压电陶瓷的非线性和蠕变的机械缺陷。该方法在系统环境控制条件下适用于毫米行程位移,可应用于纳米计量和超精密加工等领域。
Aiming at the improvement of positioning accuracy in industrial field and metrology field, a positioning control method based on inverse characteristic of Michelson interferometer is proposed. The method uses phase-locked control and heterodyne interferometry to perform position measurement and control. Under the strict control of the experimental environment, a bi-directional stepping displacement of 5 nm was obtained. The uncertainty of the step value is 8 × 10-9 nm, and the displacement repeatability error is less than 1 nm. The measurement method of this positioning method can be traced directly to the length standard, and the photoelectric step-by-phase method can overcome the mechanical defects of non-linearity and creep of piezoelectric ceramics. The method is suitable for the displacement of millimeter under the control of the system environment and can be applied to the fields of nanometer metering and ultra-precision machining.