Fabricating well-aligned carbon nanotubes, especially, on a silicon substrate is very important for their applications. In this paper, an aligned carbon nanotube array has been prepared by pyrolysis of hydrocarbons catalyzed by nickel nanoparticles embedded in porous silicon (PS) templates. High-magnification transmission electron microscopy images confirm that the nanotubes are well graphitized. The PS substrates with pore sizes between 10 and 100 nm play a control role on the growth of carbon nanotubes and the diameters of the tubes increase with the enlargement of the pores of the substrates. However, such a control role cannot be found in the macro-PS substrates.