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介绍一种用溶胶 凝胶方法制作掺铒Al2 O3薄膜的工艺 实验测量了薄膜样品的光致发光光谱特性 结果表明光致发光光谱的峰值波长为 1.5 36 μm ,半值宽度为 34nm ;同时测量了光致发光光谱的峰值强度与泵浦功率、掺铒浓度及退火温度之间的关系
In this paper, a method for preparing erbium-doped Al 2 O 3 thin films by sol-gel method was introduced. The photoluminescence (PL) characteristics of thin films were measured. The results showed that the peak wavelength of PL spectrum was 1.5 36 μm and the FWHM of the films was 34 nm. The relationship between the peak intensity of photoluminescence spectra and pump power, erbium concentration and annealing temperature