用XPS方法研究了Ag-Pd合金在氩离子轰击下表面组成的变化。结果表明,由于Ag-Pd表面原子间结合能不同,合金在热退火后表面富Ag,经氩离子轰击后表面富Pd。将合金表面的Ag-Pd溅射产额比与相应的文献结果作了比较。在本文的实验条件下,合金组分间的相对溅射产额随合金成分变化,与氩离子轰击合金形成表面无序层有关。含Pd量为0.32at.-％的稀Pd合金的溅射结果表明,其组分的溅射产额比与含Pd量较多时的结果有明显差别。 The change of surface composition of Ag-Pd alloy under argon ion bombardment was studied by XPS method. The results show that due to the different binding energies between the atoms of Ag-Pd, the surface of the alloy is Ag rich after thermal annealing, and the surface is enriched with Pd after argon ion bombardment. The Ag-Pd sputtering yield ratio on the alloy surface is compared with the corresponding literature results. Under the experimental conditions in this paper, the relative sputtering yield between the alloy components varies with the composition of the alloy, which is related to the surface disorder layer formed by the argon ion bombardment alloy. Sputtering results of dilute Pd alloys with a Pd content of 0.32 at .-% show that there is a clear difference in sputter yield ratio between the components and the Pd content.