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本文利用微区薄层电阻测试的一种斜置四探针新方法，将扩散微区薄层电阻测试结果绘成全片的灰度图，这种微区薄层电阻测试Mapping技术十分有利于评价材料的质量。在测试过程中应用微处理器，可立即数字显示相应的测量电压及微区的薄层电阻，加快了计算速度并有利于控制探针的合适位置。
In this paper, we use a new method of oblique four-probe in the micro-area sheet resistance test to make the diffusion micro-area sheet resistance test result into the whole piece of gray map. This micro-area sheet resistance test mapping technology is very helpful for the evaluation The quality of the material. Microprocessors are used during the test to instantly display the corresponding measured voltage and the sheet resistance of the microdomains, speeding up calculations and helping to control the proper placement of the probe.