阐述了半导体光电位置敏感器件双层结构、特点,在此基础上,利用三层前置反馈网络对光电位置敏感器件的空间非线性以及畸变产生的机理进行了分析,尤其是对在位置敏感器件边缘的非线性作了分析研究;提出了一种适于位置敏感器件的敏感前置放大器电路和产生双极脉冲的分光滤波器;通过实验模拟,验证了上述理论和方法的正确性,并对双层结构的位置敏感器件在精密探测中的应用作了展望。 Based on this, the three-layer pre-feedback network is used to analyze the spatial nonlinearity and the mechanism of the distortion of the photoelectric position-sensitive device. Especially in the field of position sensitive device The nonlinearity of the edge is analyzed and analyzed. A sensitive preamplifier circuit and a spectroscopic filter for generating bipolar pulses are proposed. The experimental results show the correctness of the above theories and methods. The application of double-layer position sensitive device in the precision detection is prospected.