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提出了一种复数拟合非单调函数的基函数 ,利用傅里叶变换和复数拟合导出了包含有耗介质的三维闭式近似格林函数 .通过格林函数实部和虚部的误差比较以及硅衬底螺旋电感的建模实例 ,证明了复数拟合的近似格林函数在电容参数提取中是精确和有效的
This paper presents a basis function for complex fitting nonmonotonic function, and derives a three dimensional closed approximation Green’s function containing lossy medium by using Fourier transform and complex fitting. By comparing the error of real part and imaginary part of Green function, The modeling example of the substrate spiral inductance proves that the approximate Green’s function of complex fitting is accurate and effective in the capacitance parameter extraction