论文部分内容阅读
介绍了硅中氢杂质的基本性质 ,氢杂质和氧原子的作用 ,以及氢原子对其它杂质和缺陷电学性能的影响 ,同时指出了目前研究中有待解决的问题。
The basic properties of hydrogen impurities in silicon, the role of hydrogen impurities and oxygen atoms, and the influence of hydrogen atoms on the electrical properties of other impurities and defects are introduced. At the same time, the problems to be solved in current research are pointed out.