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在室温和无添加气体条件下,完成了六甲基二硅胺烷较低功率密度的等寒子体聚合。研究了聚合膜的沉积规律和过程。给出了聚合物膜的结构和性质。得到经验式为 C_(1.42)H_(2.65)N_(0.2)O_(0.15)Si的新聚合物。
The isomerization of hexamethyldisilazane at lower power density was achieved at room temperature with and without added gas. The deposition law and process of polymer film were studied. The structure and properties of polymer films are given. The new polymer with the empirical formula C_ (1.42) H_ (2.65) N_ (0.2) O_ (0.15) Si was obtained.