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石英谐振式力传感器是一种新型的数字式传感器，本文研究了由柔性铰链组成的弹性体和ＡＴ－切石英谐振器构成的石英谐振式力传感器的蠕变特性的影响因素。石英谐振式力传感器的蠕变主要是由于粘弹性的胶粘剂造成的，本文以描述表面形貌的ＷＡ 模型和粗糙度微峰模型为基础，建立了蠕变与接触表面形貌和安装预紧力之间关系的模型。理论计算和实验结果表明，蠕变与接触表面形貌和安装预紧力分别近似地成反比和正比。不同接触表面粗糙度对蠕变影响的对比实验结果表明，随着表面粗糙度的减小，传感器的蠕变误差下降
Quartz resonant force sensor is a new type of digital sensor. This paper studies the factors that influence the creep characteristics of quartz resonant force sensor composed of elastomer with flexible hinge and AT-cut quartz resonator. The creep of the quartz resonant force sensor is mainly caused by the viscoelastic adhesive. Based on the WA model and the roughness micro-peak model describing the surface morphology, this paper establishes the creep and contact surface topography and the pre-tightening force The relationship between the model. The theoretical calculation and experimental results show that the creep and the contact surface topography and the installation pre-tightening force are approximately inversely proportional and proportional respectively. The experimental results of different contact surface roughness on the creep effect show that as the surface roughness decreases, the creep error of the sensor decreases