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由上海技术物理所和上海元件五厂组成的红外线三结合小组,于77年12月14日试制成功我国第一台HSX-1红外扫描显微镜。 红外扫描显微镜是显示并测定小目标表面热分布的仪器,所以又称红外显微热像仪,它特别适用于测定各种半导体器件表面的热状态,对器件的设计鉴定、失效分析、可靠性检查提供一个新的手段,与其他方法相比,它具有下列特点: a.是被动式,非接触器式测试仪器,不会破坏被测器件表面。 b.具有高的空间分辨率,一般可做到小于100微米。 c.能适时显示出整个被测器件表面热分布的全貌,如果需要记录,可用照相办法永久保留其热图象。
By the Shanghai Institute of Technical Physics and the Shanghai Component Factory five infrared combination of three groups, on December 14, 77 trial successfully China's first HSX-1 infrared scanning microscope. Infrared scanning microscope is to display and determine the small target surface thermal distribution of the instrument, so called infrared microscopy, it is particularly suitable for measuring the thermal status of the surface of a variety of semiconductor devices, the device design identification, failure analysis, reliability Inspection provides a new means, compared with other methods, it has the following characteristics: a. Is passive, non-contact test equipment, will not damage the surface of the device under test. b. With high spatial resolution, generally less than 100 microns can be achieved. c. Can display the whole picture of the heat distribution on the surface of the tested device timely, if the record needs to be, the thermal image can be permanently preserved by the photographic method.