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介绍了采用簧片式硅弹性膜芯片研制成功的压力敏感元件和传感器,利用这种硅芯片已制得灵敏度和量程范围各不相同的性能优良的压力传感器.
This paper introduces the pressure-sensitive components and sensors which are successfully developed by the reed-type silicon elastic membrane chip, and the excellent performance pressure sensor with different sensitivity and range has been made by using this silicon chip.