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四、关于工艺参数的测量和控制为了获得工艺重见性,提供正确可靠的工艺参数尤为重要。离子氮化的工艺参数主要包括处理温度、气体成分和流量、气压、处理时间、辉光电压和电流密度等。时间、电压、电流等参数的测量和控制比较简单,但是,目前在温度、气体流量、气压等工艺参数的测量或控制方面仍存在一定问题。下面就这方面的一些问题进行一些讨论。1.温度的测量离子氮化零件的温度是由离子轰击零件表面,将动能转换成热能而得到的。实验测定离子氮化的温度场表明:离子氮化条件下气体异常辉光放电等离子区的温度场是不均匀的,在氮化温度范围内,距零件表面0.5mm处辉光区的温度比零件表面的实际温度低
Fourth, on the measurement and control of process parameters In order to obtain the process of re-visibility, to provide the correct and reliable process parameters is particularly important. Ion nitriding process parameters include the processing temperature, gas composition and flow, pressure, processing time, glow voltage and current density. Time, voltage, current and other parameters of the measurement and control is relatively simple, but the current temperature, gas flow, pressure and other process parameters measurement or control there are still some problems. Here are some of the issues in this area for some discussion. 1. Measurement of temperature The temperature of the ionized nitride part is obtained by ion bombardment of the surface of the part and conversion of kinetic energy into thermal energy. The experimental results show that the temperature field of ion nitriding shows that the temperature field of gas glow discharge plasma under ion nitriding is inhomogeneous. In the nitriding temperature range, the temperature of the glow region at 0.5mm from the surface of the part is higher than that of the part The actual surface temperature is low