论文部分内容阅读
本文叙述对提供溅射薄膜光学厚度的实时监控工业用的溅射装置的改进。允许通过氦氖激光束时,设计利用在靶中心有个真空小窗口,通过溅射膜增长调节反射光强容许就地测量其厚度。
This article describes improvements to a sputtering device for industrial use that provides real-time monitoring of the optical thickness of a sputtered film. When a helium-neon laser beam is allowed to pass through, the design utilizes a small vacuum window in the center of the target to allow in-situ measurements of its thickness by adjusting the reflected light intensity through sputtering film growth.