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探讨了在铝及铝合金基体上离子镀ＴｉＮ薄膜的可行性，研究了各工艺因素和掺入微量Ｃｒ、Ｆｅ对ＴｉＮ膜质量及性能的影响，同时还研究了铝基离子镀ＴｉＮ薄膜的最佳工艺条件。结果表明，在铝合金基体上离子镀ＴｉＮ薄膜是可行的。
The feasibility of ion-plating TiN film on aluminum and aluminum alloy substrates was discussed. The effects of various process factors and micro-amounts of Cr and Fe on the quality and properties of TiN films were studied. The effects of TiN films on aluminum- Good process conditions. The results show that it is feasible to deposit TiN film on the aluminum alloy substrate.