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在中国原子能科学研究院HI- 13串列加速器上建立了一套高分辨的弹性反冲探测分析技术 .用高质量的1 2 7I重离子束轰击薄膜或块材靶样品 ,利用Q3D磁谱仪及其焦面探测器和纵向型双电离室ΔE -E望远镜探测器两套探测系统 ,在前角区测量了靶中各种元素的反冲能谱 .利用卢瑟福散射截面和离子在靶材料中的阻止本领 ,将能谱转换成元素的深度分布 .利用Q3D磁谱仪系统 ,对C和H等轻元素的分析得到纳米级的深度分辨谱 .用ΔE -E望远镜探测器可同时得到靶材料上从轻至中重各种元素的深度分布 ,其深度分辨率达 2 0— 30nm .
A set of high-resolution elastic recoil detection and analysis technology was set up on the HI-13 tandem accelerator of China Institute of Atomic Energy.Bonded with high quality 1 2 7I heavy ion beam, the film or bulk target was bombarded with Q3D magnetic spectrometer And its focal plane detector and vertical double ionization chamber ΔE-E telescope detector two sets of detection system, in the front corner of the measured target recoil energy spectrum of various elements using Rutherford scattering cross section and ions in the target Material in the ability to stop, the spectrum is converted to the depth of the element distribution using Q3D magnetic spectrometer system, light elements such as C and H light-depth analysis of the nano-resolution spectrum obtained with the ΔE-E telescope detector can be simultaneously Target material from light to medium depth of the various elements of the depth distribution, the depth of resolution of 20-30nm.