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由于表面横波(STW)器件具有温度稳定性好、声速高、功率处理能力强等优点,过去几年中,人们愈来愈重视发展STW器件.金属反射栅是谐振器及谐振型滤波器的重要组成部分,其性能的好坏对整个器件的性能影响很大,此前对金属反射栅特性的一些理论计算是在假设每根指条的金属化比和金属膜厚都完全一样的条件下获得的模拟结果,而且模式转化也很难精确估计,这就带来了理论计算与实验结果的明显差异.研究的主要目的是在实验上揭示表面横波在金属反射栅阵下传播的基本特性,为石英上STW高频谐振型器件的设计与开发提供实验数据.文中对ST34°切石英上SAW与STW的金属栅阵反射特性进行了实验比较.试验结果表明,在相同条件下STW的金属栅阵反射效率要高于声表面波(SAW)的反射效率,它与SAW金属反射栅阵的本质区别是不论短路还是开路栅阵,STW的金属栅阵反射中心都低于换能器的激发中心.为验证实验结果,文中设计了915MHz的STW单端对谐振器,其中换能器与反射栅的频率差取值比声表面波小,而且反射栅也由301根减到201根,测试结果表明谐振器的插入损耗和Q值等关键参数没有明显退化.
Due to its advantages of good temperature stability, high acoustic velocity and high power handling capability, surface-based shear wave (STW) devices have become more and more important for the development of STW devices over the past few years. Metallic reflective barriers are important for resonators and resonant filters Components, the performance of the performance of the whole device has a great impact on the performance of the metal reflective grating some of the previous theoretical calculations are assumed that each finger metallization and metal film thickness are obtained under exactly the same conditions Simulation results, and model transformation is also difficult to accurately estimate, which led to significant differences between theoretical calculations and experimental results.The main purpose of the study is to experimentally reveal the basic characteristics of the surface transverse wave propagation in the metal reflective grid, quartz The STW high frequency resonant devices on the design and development of experimental data provided in this paper on the ST34 ° cut quartz SAW and STW metal grid array reflection characteristics of the experimental comparison.The experimental results show that under the same conditions STW metal grid array reflection The efficiency is higher than that of SAW. The essential difference between it and SAW metal reflector is whether the short-circuit or open-circuit grid, STW metal grid array reflection Are lower than the excitation center of the transducer.To verify the experimental results, we design a 915MHz STW single-ended pair resonator, in which the frequency difference between the transducer and the reflection grating is smaller than the SAW, 301 reduced to 201, the test results show that the resonator insertion loss and Q key parameters such as no significant degradation.