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对薄膜测厚系统进行了详尽剖析,从整体上论述了膜厚测量系统,研究了测厚系统中薄膜测厚仪的关键硬件电路,对薄膜测厚仪的软件流程进行了离散设计。以AVR单片机为核心处理器进行了数据采集和处理,设计并生产出了在线式光学薄膜厚度测量与监控系统。通过与实际膜厚进行对比实验,验证了薄膜测厚系统具有高精度、高稳定性和高可靠性,可应用于实际工业生产。
The film thickness measurement system is analyzed in detail, and the film thickness measurement system is discussed in the whole. The key hardware circuit of the film thickness gauge in the thickness measurement system is researched. The software flow of the film thickness gauge is designed discretely. AVR microcontroller as the core processor for data acquisition and processing, design and production of online optical film thickness measurement and monitoring system. By comparing with the actual film thickness, it is verified that the film thickness measurement system has high precision, high stability and high reliability, and can be applied to practical industrial production.