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研 究 当 增 透 亚 波 长 光 栅 置 于 MEMS(Micro-Electro-Mechanical System) 波 长 可 调 谐VCSEL(Vertical Cavity Surface Emitting Laser)不同位置中（内腔，上 DBR(Distributed Bragg Reflectors)上表面和下表面）对器件波长调谐范围，驻波场，谐振腔波长的影响。通过建模计算得出在三种位置当中当亚波长光栅置于 MEMS 波长可调谐 VCSEL 的内腔中能实现很高的波长调谐在文中的条件下波长调谐可达到 54nm，而光栅置于器件上 DBR 上表面和下表面时仅能实现 40nm 和 33nm 的波长调谐。通过分析驻波场时可以发现当亚波长光栅置于上 DBR 上表面时有源区能量占总能量的 0.36%，而置于上 DBR下表面和内腔时分别是 0.08%和 0.02%。在比较三种结构谐振腔波长时可以发现对于光栅在内腔和上 DBR下表面时 TE 和 TM 偏振对应的谐振腔波长分别出现了 8.3nm 和 10.1nm 的分离，而光栅在 MEMS 波长可调谐 VCSEL 表面时两个偏振波长并没有偏离，这可以知道光栅在内腔和上 DBR 上表面实现偏振稳定原理是和光栅在上 DBR 上表面是不同的。
In the research, when the extra-transparent subwavelength grating is placed in different positions (cavity and upper DBR (Distributed Bragg Reflectors) on the surface of MEMS (Micro-Electro-Mechanical System) wavelength tunable VCSEL (Vertical Cavity Surface Emitting Laser) Device wavelength tuning range, standing wave field, the wavelength of the resonator. The modeling calculations show that wavelength sub-wavelength tunings can be achieved up to 54 nm when the sub-wavelength grating is placed in the cavity of a MEMS wavelength tunable VCSEL in three locations and the grating is placed on the device Only 40 nm and 33 nm wavelength tuning is achievable on the upper and lower surfaces of the DBR. By analyzing the standing wave field, it can be found that the energy of the active region accounts for 0.36% of the total energy when the sub-wavelength grating is placed on the upper surface of the DBR, and 0.08% and 0.02% respectively when placed on the lower DBR and lumen. Comparing the wavelength of the three structure resonators, it can be found that the separation of 8.3nm and 10.1nm occurs for the resonator wavelength corresponding to the TE and TM polarization respectively when the grating is on the lower surface of the cavity and the upper DBR, while the grating is separated on the MEMS wavelength tunable VCSEL The two polarized wavelengths at the surface do not deviate from each other. It can be seen that the principle of polarization stabilization of the grating on the upper surface of the inner cavity and the upper DBR is different from the grating on the upper surface of the upper DBR.