论文部分内容阅读
随着遥感遥测科学技术的发展和军事上的需要，红外探测器及红外焦平阵列的应用日益迫切［１］。Ｐ＋－Ｓｉ１－ｘＧｅｘ／ｐ－Ｓｉ异质结内光发射红外探测器因其具有易和ＣＭＯＳ或ＣＣＤ读出电路实现单片集成，工艺简单，成本较低，可同时工作于３～５μｍ和８～１４μｍ...
With the development of remote sensing telemetry science and technology and military needs, the application of infrared detectors and infrared focal plane arrays is increasingly urgent [1]. P + -Si1-xGex / p-Si Heterojunction Light Emitting Infrared Detector Because of its easy and CMOS or CCD readout circuit monolithic integration, simple process, low cost, can work at the same time 3 ~ 5μm and 8 ~ 14μm ...