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采用溶胶-凝胶法和快速热处理工艺,分别以不锈钢(SS)和镍合金(NC)为基片,成功制备了表面均匀、无裂纹的锆钛酸铅(Pb(Zn0.53Ti0.47)O3,简写为PZT)薄膜。为了缓解金属基片与PZT薄膜之间由于晶格常数和热膨胀系数不同所造成的不匹配状态,引入了镍酸镧(LaNiO3,简写为LNO)薄膜作为过渡层。XRD和SEM结果表明,经过600oC下30min的晶化,PZT薄膜已经由无定型转化为钙钛矿相。以LNO为过渡层,在NC金属基片上制备的PZT薄膜具有较高的介电常数和较低的损耗(1kHz下ε=717,tanδ=0.08),较低的漏电流(50kV/cm下J=2.6×10-7A/cm2)以及较好的铁电性能(+Pr=90μC/cm2,-Pr=14μC/cm2,Ec=32.5kV/cm)。同时,在SS基片上,通过引入LNO过渡层,制备的PZT薄膜也具有比较好的性能。
The lead zirconate titanate (Pb (Zn0.53Ti0.47) O3) with uniform surface and no crack was successfully prepared by sol-gel method and rapid heat treatment using stainless steel (SS) and nickel alloy , Abbreviated as PZT) film. In order to alleviate the mismatch between the metal substrate and the PZT thin film due to different lattice constants and thermal expansion coefficients, a lanthanum nickelate (LaNiO3) thin film was introduced as a transition layer. XRD and SEM results show that the PZT thin film has been transformed from amorphous to perovskite phase after crystallization at 600oC for 30min. With LNO as transition layer, the PZT thin films fabricated on NC metal substrate have higher dielectric constant and lower loss (ε = 717 at 1kHz, tanδ = 0.08), lower leakage current (J at 50kV / cm) = 2.6 × 10 -7 A / cm 2) and better ferroelectric properties (+ Pr = 90 μC / cm 2, -Pr = 14 μC / cm 2, Ec = 32.5 kV / cm). Meanwhile, on the SS substrate, by introducing LNO transition layer, prepared PZT film also has better performance.