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水文给出了三种不同工艺制备的 ＴｉＮ薄膜样品的俄歇分析结果，并对不同ＴｉＮ薄膜中组份变化对其力学性能的影响进行了讨论。实验结果表明，氧的存在对ＴｉＮ膜有较大影响，氧含量增高，表面光泽由金黄色逐渐变为暗红色，膜的附着力由大变小。俄歇剖面分析谱图表明，随着氧含量的增加，膜中的ＴｉＮ均匀性变差，在ＴｉＮ与Ｆｅ的界面处氧的含量也逐渐增加．这一结果表明，氧在氮化钛膜与铁基底的接触界面上的存在，影响了膜与铁基底之间的附着力，它是影响其表面上 ＴｉＮ膜的力学性能的原因之一。另外，对俄歇分析和剖面分析中谱图中Ｔｉ峰与Ｎ峰的重迭进行了处理。其方法与文献报导的不同，具有简便、准确的特点
Hydrodynamics The results of Auger analysis of TiN films prepared by three different processes are given. The effects of the composition changes on the mechanical properties of different TiN films are also discussed. The experimental results show that the presence of oxygen has a greater impact on the TiN film, the oxygen content increased, the surface luster gradually changed from golden yellow to dark red, the adhesion of the film from large to small. The Auger profile analysis shows that with the increase of oxygen content, the uniformity of TiN in the film deteriorates and the oxygen content increases gradually at the interface of TiN and Fe. This result shows that the presence of oxygen at the contact interface between the titanium nitride film and the iron substrate affects the adhesion between the film and the iron substrate and is one of the factors that affect the mechanical properties of the TiN film on the surface. In addition, the overlap between the Ti peak and the N peak in the Auger analysis and profile analysis was processed. The method is different from that reported in the literature, which is simple and accurate