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容栅传感器是一种新型的大位移传感器,在数显量具中得到广泛应用,但对其作深入、细致的实测和分析的还不多见。本文采用理论计算和实际测试相结合的方法,研究容栅传感器的数学模型,提出新的等效电路,对激励电压、电容量与位移之间关系以及输出电压进行实测和计算机分析。
Capacitance grid sensor is a new type of large displacement sensor, which is widely used in digital measuring instruments. However, it is rare to conduct in-depth and meticulous measurement and analysis. In this paper, the theoretical calculation and the actual test method are combined to study the mathematical model of capacitive grid sensor. A new equivalent circuit is proposed. The relationship between excitation voltage, capacitance and displacement and the output voltage are measured and analyzed by computer.