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作者从电磁学基本理论出发,阐明了正交磁场对提高直流三极溅射沉积率的工作原理。并介绍了正交磁场的施加方法和DMZ-450型正交电磁场直流三极溅射炉的特性,它所沉积的TiC涂层质量及其初步的应用效果。
Based on the basic theory of electromagnetics, the author illustrates the working principle of orthogonal magnetic field to improve deposition rate of DC three-pole sputtering. The application method of orthogonal magnetic field and the characteristics of DMZ-450 orthogonal electromagnetic field DC three-pole sputtering furnace, the quality of TiC coating deposited by it and its preliminary application effect are introduced.