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为了研究移动脉冲激光刻蚀单/双层金属/聚酰亚胺基复合材料的规律,利用有限元方法建立了移动纳秒脉冲激光刻蚀的通用模型,讨论了移动速度对激光刻蚀深度的影响,分析了金属铝薄膜和双层金属膜在移动脉冲激光作用下的温度变化规律。结果表明,当激光移动速率一定时,刻蚀深度开始时不断增加,但增加幅度逐渐减小,刻蚀深度逐渐趋于一定值,即达到最大刻蚀深度;金属与基底材料界面处的温度变化相较于金属薄膜靠近光源处的在时间上有一定滞后,基底温度在激光关闭后可继续上升;刻蚀双层金属膜时,下层选用较厚且热导率较大的金属薄膜有利于保护聚酰亚胺基底。
In order to study the rule of moving pulsed laser etching of single / double-layer metal / polyimide matrix composites, a general model of moving nanosecond pulsed laser etching was established by finite element method. The effects of moving speed on laser etching depth Influence, the temperature change rule of metal aluminum film and double metal film under moving pulsed laser was analyzed. The results show that when the laser moving rate is constant, the etching depth increases at the beginning, but the increasing amplitude decreases gradually, and the etching depth tends to a certain value, which reaches the maximum etching depth. The temperature change at the interface between the metal and the substrate material Compared with the metal film near the light source at a time lag, the substrate temperature in the laser can continue to rise after the closure; etching double-layer metal film, the lower layer thicker and larger thermal conductivity of the metal film is conducive to the protection Polyimide substrate.