论文部分内容阅读
提出了一种基于全石英结构的非本征F-P光纤干涉压力传感器,该传感器具有很高的压力灵敏特性。压力灵敏度为5.18nm/KPa (0.75nm/psi),分辨率为38Pa (0.005psi)。由于激光加工的过程中在光纤与石英毛细管之间保留了通风孔,所有该传感器具有极低的温度敏感特性,约0.011nm/℃,与此相应的压力测量误差是0.021KPa/℃(0.003psi/℃)。由于通风孔的存在,传感器的工作点也不会随着背景压力的变化而漂移。因此,该传感器适用于液位测量、环境监测以及其他恶劣环境的工业应用。“,”A novel high sensitivity pressure sensor based on all-fused-silica Extrinsic Fabry-Pérot optical fiber interferometer, which exhibits extreme low temperature dependence, has been developed. The sensor can excellently operate with a sensitivity of 5.18nm/KPa (0.75nm/psi), a resolution of 38Pa (0.005psi). Due to epoxy-free bonding and reserving a vent hole between the fiber and the ferrule in the process of laser heating fusion bonding, the temperature dependence is significantly reduced to the 0.011nm/℃, and pressure measurement error is 0.021KPa/℃ (0.003psi/℃). The operating point doesn’t shift with backpressure change due to the vent hole. The sensor may be suitable for liquid measurement, environmental monitoring and other industrial applications in harsh environment.