提出一种放电结构和理论模型，对表面波发生器的表面波放电等离子体特性进行了分析。在给定的工作气压、注入微波功率及所吸收的外场功率情况下，利用这一理论可以求出放电管内电子密度、电子温度以及微波电场强度的绝对值和径向分布。分析表明，这种放电结构很适于ＣＯ２激光器高效率的微波激励。 A discharge structure and theoretical model are proposed to analyze the surface plasmon wave discharge plasma characteristics of surface wave generator. Under the condition of working pressure, microwave power and absorbed external field power, the absolute value and radial distribution of electron density, electron temperature and microwave electric field in the discharge tube can be obtained by using this theory. Analysis shows that this discharge structure is very suitable for CO2 lasers with high efficiency microwave excitation.