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:随着光学光刻技术向更小特征尺寸加工推进 ,必然要重视提高分辨率的方法。通过强、弱离轴方法的照明变形技术正引起极大的关注。特别是研究x、y定向的特征尺寸 ,照明分布形状可不一定是圆形的。介绍了采用直角特性的照明形状可提高成像质量。讨论了方形照明的用途 ,并确定了它与光学邻近校正 (OPC)、像差及其它成像因素的关系。
: As optical lithography advances to smaller feature sizes, there is bound to be emphasis on ways to increase resolution. Lighting deformation techniques that are strong and weak off-axis methods are attracting great attention. In particular, x, y directional feature size, illumination distribution may not be circular shape. Introduced the use of right-angle characteristics of the lighting shape can improve imaging quality. The use of square lighting is discussed and its relationship to optical proximity correction (OPC), aberrations, and other imaging factors is determined.