在质谱分析技术中,四极质谱计很有前途。但在长期使用中,四极探头的污染可导致仪器灵敏度下降和离子谱的显著变化,这就限制了仪器的应用。对于一个污染严重的四极探头,目前还只能用机械研磨的方法来清洗,这给使用者带来很大困难。因此,研究形成污染的主要因素并寻找较易解决污染的方法是十分必要的。本实验在一个有油真空系统中,观察四极质谱计对氧的灵敏度和离子谱的变化。实验结果表明:在有油情况下,氧可以加速离子源的污染。从污染件的俄歇分析看出,污染物由碳、硅、氧等组成,它可能为二甲基硅氧烷烃环多聚体(Me_2SiO)_n 交织成网状结构形成块状 Quadrupole mass spectrometers are promising in mass spectrometry. However, in the long-term use, the contamination of the quadrupole probe can lead to the decrease of the sensitivity of the instrument and the significant change of the ion spectrum, which limits the application of the instrument. For a serious pollution of the quadrupole probe, the current method can only be used for mechanical cleaning, which gives the user a great deal of difficulty. Therefore, it is necessary to study the main factors of pollution formation and find a solution to the pollution problem. In this experiment, an oil-vacuum system was used to observe the changes of the sensitivity and the ion spectrum of the quadrupole mass spectrometer to oxygen. The experimental results show that oxygen can accelerate the pollution of the ion source in the presence of oil. From the Auger analysis of contaminants, it can be seen that pollutants consist of carbon, silicon, oxygen, etc. It may be that the dimethylsiloxane hydrocarbon ring polymer (Me_2SiO) _n is interwoven into a network structure to form a massive