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目前,利用单根碳纳米管进行纳电子器件的研制成为纳电子学界研究的前沿与热点,但在纳电子器件研制过程中,如何实现单根碳纳米管与微电极的精确装配与电连接成为关键技术难题之一。为探索实现此关键技术的新方法,本文尝试将介电电泳与具有实时力/视觉反馈的原子力显微镜操作方法相结合,从而结合粗、精两级操作方式,来实现单根碳纳米管的精确装配与电连接。单根多壁碳纳米管的精确装配与电特性测试实验验证了该方法的有效性,从而为装配研制基于单根纳米管/线的纳电子器件提供了一种新颖可行的方法。
Currently, the development of nanoelectronic devices using single carbon nanotubes has become the frontier and hot point in the field of nanoelectronics research. However, in the process of developing nanoelectronic devices, how to accurately assemble and electrically connect single carbon nanotube with microelectrodes becomes One of the key technical problems. In order to explore a new method to realize this key technology, this paper attempts to combine dielectrophoresis with the AFM operating method with real-time force / visual feedback to combine the coarse and fine operating modes to achieve accurate single carbon nanotube Assembly and electrical connection. The accurate assembly and electrical characterization experiments of single multi-walled carbon nanotubes (MWCNTs) verify the effectiveness of the proposed method and provide a novel and feasible method for assembly and fabrication of nanoelectrodes based on single nanotube / wire.