RESEARCH ON A SCANNING NEAR-FIELD MICROSCOPY BASED ON A QUARTZ RESONATOR

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A scanning near-field acoustic microscopy(SNAM) us ed in imaging the topography of precise surfaces is presented. As a micro-force sensor, a non-encapsulated 1 MHz quartz resonator is damped by hydrodynamic fo rces when approaching an object. Thus the oscillating characteristics of the leg of the quartz resonator change. While measuring the decrease of the amplitude o f vibrating, the shape of the object can be obtained. Based on the analyses of t he principle and key parameters of SNAM, a SNAM is exploited. A lateral resoluti on of 0.5 μm and vertical resolution of 2 nm has been achieved in the experimen ts.
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