A new concept used for designing large-scale and high-precision NC slideway grinders which are called self-collimation slideway grinders is introduced to eliminate thermal deformation of them. Its principle is to make use of gravitational deformation of machine beds and their foundations automatically to compensate for thermal deformation caused by environmental temperature fluctuation and friction heat between machine tables and machine beds by decreasing longitudinal section stiffness of machine beds and foundations. By FEM analysis and application of more than 10 years, it shows that they have advantages of high precision and low cost, moreover, no constant temperature rooms are required. The linearity error of parts machined with them is less than 0.003 mm/m, and machining precision can almost keep constant for a long time. A new concept used for designing large-scale and high-precision NC slideway grinders which are called self-collimation slideway grinders is introduced to eliminate thermal deformation of them. Its principle is to make use of gravitational deformation of machine beds and their foundations automatically to compensate for thermal deformation caused by environmental temperature fluctuation and friction heat between machine tables and machine beds by decreasing longitudinal section stiffness of machine beds and found. By FEM analysis and application of more than 10 years, it shows that they have advantages of high precision and The linearity error of parts machined with them is less than 0.003 mm / m, and the machining precision can almost keep constant for a long time.