真空镀膜是近年来发展十分迅速的一门技术。真空镀膜的应用范围越来越广泛,已渗透到国民经济的许多领域中。利用镀膜技术可得到各种精制的产品,如微电子电路,各种光学元件,塑料、纸张、纺织品上蒸镀金属,门窗玻璃及铁板镀层,耐磨工具或机械元件等。镀件有大有小,大的如天文望远镜的反射镜直径达几米,小的如钮扣只有几毫米。蒸镀速度也很快,已实现了每周完成数千平方米或每个循环数千个元件的沉积任务。这些迹象表明,不久的将来镀膜技术还要有更大的发展。 Vacuum coating is a very rapid development in recent years, a technology. The application of vacuum coating is becoming more and more widespread and has penetrated many areas of the national economy. The use of coating technology can be a variety of refined products, such as microelectronic circuits, a variety of optical components, plastic, paper, textile and metallized metal, glass and iron plate coating, wear-resistant tools or mechanical components. Plated parts are large and small, large telescopes such as astronomical telescope diameter of several meters, small, such as buttons only a few millimeters. The deposition rate is also fast, enabling the deposition of thousands of square meters per week or thousands of components per cycle. These indications show that in the near future coating technology should be further developed.