本文叙述了P型汽相掺杂剂-乙硼烷和戊硼烷-主要的物理和热力学特性。在半导体工业的硅外延、扩散以及其他工艺中,这两种掺杂剂具有重要的作用。叙述的特性数据包括临界常数、蒸汽压、汽化热、热容量、密度、粘度、表面张力、热导、形成热和形成的自由能。这些特性以简明的曲线形式给出,可供从事研究设计、研制和生产的科技工作人员使用。 This article describes the main physical and thermodynamic properties of P-type vapor phase dopants, diborane and pentaborane. These two dopants play an important role in the semiconductor industry’s silicon epitaxy, diffusion and other processes. The characterization data described include critical constants, vapor pressure, heat of vaporization, heat capacity, density, viscosity, surface tension, heat conduction, heat formation and free energy formation. These characteristics are given in the form of concise curves and are intended for use by scientific and technical personnel engaged in research, development and production.