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介绍了一种用于X射线工业检测的多通道电荷读出IC。该电荷读出IC可提供64个通道,将探测器电荷转换成模拟电压。电路由电荷放大器增益控制、增益电容阵列、时序发生器、移位寄存器链、电荷放大器阵列和采样保持放大器等组成,具有低噪声、14位动态范围等特性。电路芯片采用0.8μm标准CMOS工艺制造,芯片尺寸为3.1mm×10.9mm。电路在3.3MHz频率、5V电源电压和3.5V参考电压下工作,电路功耗为45mW。测试结果表明,在电荷放大器增益电容为0.5pF和光电二极管结电容为33pF下,电路的输出噪声达到600μV(Vrms)。
A multi-channel charge readout IC for X-ray industrial inspection is introduced. The charge sensing IC provides 64 channels to convert the detector charge to an analog voltage. The circuit consists of a gain amplifier gain control, a gain capacitor array, a timing generator, a shift register chain, a charge amplifier array and a sample-and-hold amplifier. The circuit has low noise and a 14-bit dynamic range. Circuit chip 0.8μm standard CMOS process, the chip size of 3.1mm × 10.9mm. Circuit at 3.3MHz frequency, 5V supply voltage and 3.5V reference voltage, the circuit power consumption of 45mW. The test results show that the output noise of the circuit reaches 600μV (Vrms) at a charge amplifier gain of 0.5pF and a photodiode junction capacitance of 33pF.