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基于 CCD子窗口内四个像限的光积分量随目标位置而变化的机理 ,可从摄取的 CCD数字图像提取目标的位移信号 ,本文提出一种新的方法可实现目标位移探测的亚像元分辨率。理论及实验结果表明 ,对于直径为 1μm的球体而言 ,在± 40 0 nm的范围内 ,光积分量的变化同球体的位移关系具有良好的线性度。物方和像方位移分辨率分别可达 1nm和 1/ 3 0个像元宽度 ,可满足光镊系统位移测量要求。
Based on the mechanism that the integral of light quantity of four quadrants in the CCD sub-window changes with the target position, the target displacement signal can be extracted from the taken CCD digital image. In this paper, a new method is proposed to realize the sub-pixel Resolution. Theoretical and experimental results show that for a sphere with a diameter of 1μm, the variation of the light integral has a good linearity with the displacement of the sphere within ± 40 0 nm. The object-side and image-side displacement resolutions are up to 1 nm and 1/300 pixel widths, respectively, to meet the requirements of optical tweezers system displacement measurement.