The effects of Ge in CZSi on the density and the rate of nucleation of supersaturated oxygen precipitation at lower annealing temperatures were examined.It is discovered that rod-like precipitation was suppressed when annealing at 700℃,but Ge has no effect on the morphology and the growth of oxygen precipitation at annealing temperatures more than 900℃.The results indicated that Ge neither acted as center of nucleation nor was involved in oxygen precipitation and its defect.