论文部分内容阅读
双端连续磁控溅射真空镀膜机在浙江真空设备厂研制成功浙江真空设备厂最近研制成功国内第一台J-PL-2000型双端连续磁控溅射真空镀膜机,填补了国内空白,性能达到国外同类产品先进水平。该机已于1993年11月份在上海青浦安装调试结束,并投入试生产。JPL...
Double-end continuous magnetron sputtering vacuum coating machine was successfully developed in Zhejiang Vacuum Equipment Factory Zhejiang Vacuum Equipment Factory successfully developed the first domestic J-PL-2000 double-end continuous magnetron sputtering vacuum coating machine to fill the gap in China, Performance reached the advanced level of similar foreign products. The aircraft has been in November 1993 in Shanghai Qingpu installation and commissioning ended, and put into trial production. JPL ...