表面等离子体激元(SPP)微腔具有很高的品质因子和极小的模式体积,在光电子器件研究方面具有重要的应用价值。采用有限元法对表面等离子体激元的金属覆盖介质微盘谐振腔进行理论模拟,研究考虑微盘底半径、介质层厚度及金属膜厚度等参数对微盘表面等离子体模的品质因子及模体积的影响。研究表明,在光通信波段1550nm附近获得高品质因子(1000以上),极低模式体积的表面等离子体微盘。最后研究了利用优化设计的微盘进行折射率传感的应用,获得了高达300nm/RIU的折射率传感灵敏度。 Surface plasmon polaritons (SPP) microcavities have high quality factor and very small mode volume, and have important application value in optoelectronic device research. The finite element method is used to simulate the surface plasmon polariton in metal-covered dielectric microcavity cavity. The influence of parameters such as the radius of the microdisks, the thickness of the dielectric layer and the thickness of the metal film on the quality factor and the mold volume of the microdisks is investigated. . The research shows that high quality factor (above 1000) and very low mode volume surface plasmon microphones are obtained in the optical communication wavelength band around 1550 nm. Finally, the application of the optimized design of the micro-disk for refractive index sensing was studied, and the refractive index sensing sensitivity of up to 300nm / RIU was obtained.