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飞秒激光双光子微细加工技术以其特有的高精度三维微加工优势,成为微型机械加工领域新的发展方向之一。介绍了飞秒激光双光子微细加工技术的原理和应用的现状。结合目前已有的微细加工技术,对双光子微细加工技术的特点加以评述。简要报道了利用飞秒激光双光子微细加工技术的一些研究进展。探讨了飞秒激光双光子微细加工技术今后的发展方向及其存在的基本问题。
Femtosecond laser two-photon microfabrication technology with its unique advantages of high-precision three-dimensional micro-machining, micro-machining has become one of the new areas of development. The principle and application status of the two-photon microfabrication technology for femtosecond laser are introduced. Combined with the existing microfabrication technology, the characteristics of two-photon microfabrication technology are reviewed. A brief report of some advances in the use of femtosecond laser two-photon micromachining technology is briefly presented. The development direction of the two-photon microprocessing technology of femtosecond laser and its basic problems are discussed.