X线光电子谱(X-Ray Photoelectron Spectroscopy)分析法,它是和俄歇电子谱技术并行的研究固体表面的新方法。首先由瑞典Uppsala大学K.Siegbahn教授及其同事们于1957年开始发展起来的。X线光电子谱(XPS)亦称化学分析电子谱(ESCA)。它利用高能量的激发源X线照射物质,由于光电效应而发射出光电子,由测定光电子的动能谱,可以测定内层电子和价电子的结合能(图1)。本文主要讨论内层 X-ray Photoelectron Spectroscopy, a new method of studying solid surfaces in parallel with Auger electron spectroscopy. First developed in 1957 by Professor K.Siegbahn from Uppsala University in Sweden and his colleagues. X-ray Photoelectron Spectroscopy (XPS) is also known as Chemical Analysis Electron Spectroscopy (ESCA). It uses high-energy excitation source X-ray irradiation of substances, due to the photoelectric effect of emitting photoelectrons, measured by the kinetic spectra of photoelectrons, can determine the inner electron and valence electron binding energy (Figure 1). This article focuses on the inner layer